METHOD FOR PRODUCING A TUBULAR SEMIFINISHED PRODUCT FROM QUARTZ GLASS, METHOD FOR PRODUCING AN OPTICAL COMPONENT USING THE SEMIFINISHED PRODUCT, AND SEMIFINISHED PRODUCT CONSISTING OF QUARTZ GLASS DOPED WITH FLUORINE

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United States of America Patent

SERIAL NO

12998234

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Abstract

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, and the substrate body is either fully or partially removed following the deposition of the quartz glass layer doped with fluorine.

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Patent Owner(s)

Patent OwnerAddress
HERAEUS QUARZGLAS GMBH & CO KGQUARZSTRASSE 8 HANAU 63450

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Braeuer, Karsten Bruchkoebel, DE 11 41
Langner, Andreas Freigericht, DE 22 162
Schoetz, Gerhard Aschaffenburg, DE 11 56

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