SUBSTRATE PROCESSING APPARATUS
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United States of America Patent
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app pub date -
Apr 5, 2011
filing date -
Mar 29, 2005
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Abandoned
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Abstract
In a solution change processing which comprises: changing a processing solution stored in a processing bath, specifically deionized water for sulfuric acid; and controlling the temperature of sulfuric acid so changed to a predetermined temperature, first, deionized water is discharged from a processing bath and an external bath. Subsequently, sulfuric acid is supplied from a supplying nozzle to the external bath. Subsequently, an upper circulating process is started by opening and closing a predetermined valve, while allowing a pump and a temperature controller be operated. At the time the temperature of a processing solution is higher than a predetermined value, an inside circulating process is carried out by opening and closing a predetermined valve, while having the pump and the temperature controller keep operating.
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