INSPECTION SYSTEM AND METHOD
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United States of America Patent
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Issued Date -
Jul 14, 2011
app pub date -
Aug 26, 2008
filing date -
Aug 26, 2008
priority date (Note) -
Abandoned
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Abstract
An inspection system is provided. The inspection system includes at least one source configured to emit a beam of radiation onto an object. The inspection system also includes at least two area detectors having different characteristics configured to receive a reflected beam of radiation from the object and output a plurality of image data streams corresponding to the different characteristics, wherein the at least two area detectors disposed in at least one of a cascaded arrangement or separated by a pre-determined distance along a direction parallel or perpendicular to a scan direction of the object.
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