CHARGE BALANCE POWER DEVICE AND MANUFACTURING METHOD THEREOF
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United States of America Patent
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Issued Date -
Jul 14, 2011
app pub date -
Dec 14, 2010
filing date -
Jan 12, 2010
priority date (Note) -
Abandoned
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Abstract
A charge-balance power device and a method of manufacturing the charge-balance power device are provided. The charge-balance power device includes: a charge-balance body region in which one or more first conductive type pillars as a first conductive type impurity region and one or more second conductive type pillars as a second conductive type impurity region are arranged; a first conductive type epitaxial layer that is formed on the charge-balance body region; and a transistor region that is formed in the first conductive type epitaxial layer. With this invention, it is possible to form the same charge-balance body region regardless of the structure of the transistor region formed on the top side of wafer.
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