IMAGING DEVICES FOR MEASURING THE STRUCTURE OF A SURFACE
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United States of America Patent
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Issued Date -
Jul 14, 2011
app pub date -
Oct 15, 2010
filing date -
Oct 15, 2009
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Abstract
Imaging devices for measuring a structure of a surface and methods of use are provided. In certain embodiments, an imaging device includes at least one nano-mechanical resonator pair. The pair includes a reference resonator having a reference resonant frequency, and a sense resonator having a first sense resonant frequency. The device is configured to expose the sense resonator to the surface such that the sense resonator has a second sense resonant frequency. The device is also configured to measure the structure of the surface based on a difference between the second sense resonant frequency and the reference resonant frequency. In certain embodiments, an imaging device for measuring the structure of a surface includes an array of sense nano-electromechanical resonators. In certain embodiments, the array of single nano-electromechanical resonators is advantageously arranged in a staggered configuration.
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