METHOD OF FABRICATIING OXIDE SUPERCONDUCTING THIN FILM
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United States of America Patent
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Issued Date -
Jul 7, 2011
app pub date -
Feb 18, 2009
filing date -
Aug 20, 2008
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Abstract
The present invention is a method of fabricating an oxide superconducting thin film for use in fabrication of a superconducting wire by a coating-pyrolysis process using a fluorine-free metal organic compound as a raw material. An intermediate heat treatment of decomposing a carbonate contained in a thin film to be subjected to a sintering heat treatment for a crystallizing heat treatment is conducted before the sintering heat treatment. The intermediate heat treatment is conducted in an atmosphere having a carbon dioxide concentration lower than or equal to 10 ppm. The metal organic compound is a metal organic compound containing a β-diketone complex.
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