PLANT FOR FORMING ELECTRONIC CIRCUITS ON SUBSTRATES

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United States of America Patent

APP PUB NO 20110165316A1
SERIAL NO

12997698

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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having plurality of work stations that comprise at least one station to deposit a layer on a substrate, a drying oven to dry the substrates, a testing station to test the substrates, and a storage station to store the substrates, and a transport element that is positionable in each of the work stations. A guide defines a substantially closed circuit along which a plurality of transport elements are able to be moved, on each of which at least one of the substrates is disposed.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ITALIA S R LVIA POSTUMIA OVEST 244 FRAZIONE OLMI SAN BIAGIO DI CALLALTA (TV) 31048

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baccini, Andrea Frazione Olmi, IT 45 203

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