PLASMA CVD DEVICE, DLC FILM, AND METHOD FOR DEPOSITING THIN FILM
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Jun 30, 2009
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Jul 1, 2008
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Abstract
between the counter electrode and the holding electrode, and an evacuation mechanism for evacuating the interior of the chamber, wherein the surface area “a” of the holding electrode and the surface area “b” of the counter electrode satisfy a formula below,≧2.
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