Family

Loading Family data...

• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
APPLIED MATERIALS ISRAEL LTD	9 OPPENHEIMER STREET REHOVOT 76705

International Classification(s)

• H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
• G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....

• 2008 Application Filing Year
• H01J Class
• 2253 Applications Filed
• 1192 Patents Issued To-Date
• 52.91 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Adamec, Pavel	Haar, DE	53	1042
# of filed Patents : 53 Total Citations : 1042
Banzhof, Helmut	Poing, DE	12	186
# of filed Patents : 12 Total Citations : 186
Frosien, Juergen	Riemerling, DE	46	688
# of filed Patents : 46 Total Citations : 688

Cited Art Landscape

Load Citation

• No Cited Art to Display

Loading Cited Art Landscape...

Patent Citation Ranking

• 27 Citation Count
• H01J Class

• 81.70 % this patent is cited more than
• 14 Age

Forward Cite Landscape

Load Citation

• No Forward Cites to Display

Loading Forward Cite Landscape...

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2011/0163,229

HIGH THROUGHPUT SEM TOOL

---

Abstract

---

A scanning charged particle beam device (100) is described. The scanning charged particle beam device includes a beam emitter (102) for emitting a primary electron beam, a first scan stage for scanning the beam over a specimen, an achromatic beam separator (130) adapted for separating a signal electron beam from the primary electron beam, and a detection unit (172,174,178) for detecting signal electrons.

---

 

---

Description

---

Claims

---

Claims data not available

---

Legal Events

• No Legal Status data available.