APPARATUS FOR CONTROLLING TEMPERATURE OF ELECTROSTATIC CHUCK COMPRISING TWO-STAGE REFRIGERANT FLUID CHANNEL
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United States of America Patent
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Issued Date -
Jun 30, 2011
app pub date -
Dec 3, 2010
filing date -
Dec 31, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus for controlling the temperature of an electrostatic chuck is provided. The apparatus includes an electrostatic chuck including, as a fluid channel part for circulating a refrigerant, a first fluid channel formed in an outer circumference region of the internal and a second fluid channel formed in the whole internal region, and one or more chillers for supplying refrigerant controlled to different temperatures through the first fluid channel or the second fluid channel. The first and second fluid channels are formed in two up/down stages within the electrostatic chuck, thereby being independently capable of the temperatures of a center part and edge part of a wafer.
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