Semiconductor Wafer Transport System
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United States of America Patent
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Issued Date -
Jun 23, 2011
app pub date -
Dec 23, 2009
filing date -
Dec 23, 2009
priority date (Note) -
Abandoned
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Abstract
A system and a wand are disclosed for the transport of a semiconductor wafer. The system and wand include a plate and a locator. The plate includes a plurality of plate outlets for directing gas flow against the wafer to hold the wafer using the Bernoulli principle. The locator extends from the plate and includes a locating outlet for directing a gas flow to locate the wafer laterally relative to the plate. The plate outlets and the locating outlet operate to prevent the wafer from contacting the plate or the locator. In some embodiments, a plurality of locators are used to locate the wafer laterally relative to the plate.
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