ETCHING METHOD, METHOD FOR MANUFACTURING MICROSTRUCTURE, AND ETCHING APPARATUS
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United States of America Patent
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Issued Date -
Jun 16, 2011
app pub date -
Dec 8, 2010
filing date -
Dec 16, 2009
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Abandoned
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Abstract
In one embodiment, an etching method is disclosed. The method can include producing an oxidizing substance by electrolyzing a sulfuric acid solution, and producing an etching solution having a prescribed oxidizing species concentration by controlling a produced amount of the produced oxidizing substance. The method can include supplying the produced etching solution to a surface of a workpiece.
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