Apparatus for Deposition on Two Sides of the Web
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United States of America Patent
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Issued Date -
Jun 16, 2011
app pub date -
Dec 14, 2009
filing date -
Dec 14, 2009
priority date (Note) -
Abandoned
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Abstract
Apparatuses and methods for depositing materials on both side of a web while it passes a substantially vertical direction are provided. In particular embodiments, a web does not contact any hardware components during the deposition. A web may be supported before and after the deposition chamber but not inside the deposition chamber. At such support points, the web may be exposed to different conditions (e.g., temperature) than during the deposition.
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