REFLECTIVE OBJECTIVE

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United States of America Patent

SERIAL NO

13032428

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Abstract

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A reflective objective is disclosed, in which essentially all the optical power is in a single, off-axis, concave mirror, which is oriented generally perpendicular to the central axis of the objective. An incident beam is directed to and from the concave mirror by a pair of flat mirrors, so that a central on-axis ray in the incident beam is collinear with the corresponding thrice-reflected ray at the object. The object is one focal length away from the concave mirror. The aperture stop is also one focal length away from the concave mirror, leading to a condition of telecentricity at the object. Different focal lengths for the objectives are realized by using mirrors with different curvatures, located at different distances away from the central axis of the objective. The reflective objective can optionally be retrofitted into a turret typically used for microscope objectives, and can optionally have refractive elements, making the objective catadioptric.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCFLANDERS NJ 07836

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gerber, Ronald E Richfield, US 25 235
Vaughnn, David Edina, US 19 122

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