WHISPERING GALLERY MODE ULTRASONICALLY COUPLED SCANNING PROBE MICROSCOPE
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United States of America Patent
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app pub date -
Feb 10, 2011
filing date -
Mar 18, 2005
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Abandoned
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Abstract
Scanning probe microscopes include a probe tip coupled to a tuning fork or other acoustic resonator so as to apply a shear force when contacted to a specimen surface based on an applied acoustic signal. A secondary ultrasonic transducer is in acoustic communication with the specimen and a resonant structure. Probe tip-specimen displacement can be detected based on whispering gallery mode ultrasonic waves in the resonant structure using the secondary transducer, and such displacements maintained using feedback control based on whispering gallery mode acoustic wave magnitude.
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