Method of Manufacturing Thin-Film Solar Panel and Laser Scribing Apparatus

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United States of America Patent

APP PUB NO 20110136265A1
SERIAL NO

12962212

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Abstract

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The present invention provides a method of manufacturing a thin-film solar panel with a laser scribing process to perform linear groove processing by irradiating a thin-film layer formed on a substrate with laser light to be separated from adjacent structure, including steps of: specifying an accurate position, size, shape of a adhered foreign matter on a glass substrate, a glass scratch, an air-bubble in the glass substrate causing an imperfection by inspecting a scribe line; and performing repair processing to form a new scribe line to bypass a portion of the imperfection after a final scribe line is formed.

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Patent Owner(s)

Patent OwnerAddress
HITACHI VIA MECHANICS LTDEBINA-SHI KANAGAWA-KEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HONDA, Hiroshi Ebina-shi, JP 68 759
KANAYA, Yasuhiko Ebina-shi, JP 33 427
SHIGENOBU, Keigo Ebina-shi, JP 1 11

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