SILICON CONCENTRATION MEASURING INSTRUMENT
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United States of America Patent
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Issued Date -
Jun 9, 2011
app pub date -
Jul 6, 2009
filing date -
Jul 30, 2008
priority date (Note) -
Abandoned
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Abstract
The present invention is an instrument that detects a trace amount of silicon contained in a sample solution with simple means and measures a silicon concentration in the sample solution, and adapted to include: an excitation light irradiation part that irradiates the sample solution with excitation light for silicon; a light detection part that detects fluorescence and/or scattering light emitted from silicon in the sample solution irradiated with the excitation light; and a calculation part that calculates the silicon concentration in the sample solution from intensities or an intensity of the fluorescence and/or the scattering light.
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