ELECTRON DETECTION SYSTEMS AND METHODS
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United States of America Patent
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Issued Date -
Jun 2, 2011
app pub date -
May 26, 2009
filing date -
Jun 2, 2008
priority date (Note) -
Abandoned
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Abstract
Systems and methods to detect electrons from one or more samples are disclosed. In some embodiments, the systems and methods involve one or more magnetic field sources, for deflecting secondary electrons emitted from the surface of the samples.
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