Salt and photoresist composition containing the same

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United States of America Patent

PATENT NO 8481242
APP PUB NO 20110117494A1
SERIAL NO

12946886

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A salt represented by the formula (X):

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO CHEMICAL COMPANY LIMITED2-7-1 NIHONBASHI CHUO-KU TOKYO 103-6020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Koji Toyonaka, JP 316 1995
Ochiai, Mitsuyoshi Ibaraki, JP 14 84
Sugihara, Masako Nishinomiya, JP 23 265

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