SPRAY COATING SYSTEM
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United States of America Patent
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Issued Date -
May 19, 2011
app pub date -
Nov 13, 2009
filing date -
Nov 13, 2009
priority date (Note) -
Abandoned
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Abstract
A spray coating system is provided. The spray coating system includes a spin support for supporting and spinning the substrate; a sprayer for applying a material to an upper surface of the substrate; a cup surrounding a lateral and lower region of the spin support, wherein an opening is located in an upper central region of the cup; an air supply mechanism for supplying air flows to a back surface of the substrate to prevent the material from adhering thereto, and an exhaust zone disposed below a slanted surface of the cup for exhausting the air flow and material.
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