METHODS AND APPARATUSES FOR CONTROLLING CONTAMINATION OF SUBSTRATES
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United States of America Patent
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Issued Date -
May 19, 2011
app pub date -
Dec 18, 2008
filing date -
Dec 18, 2007
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Abstract
Components, systems, and methods for maintaining an extremely dry environment within substrate containers formed of polymers provides supplemental exterior gas washing of the substrate container to minimize permeation of moisture and oxygen through the polymer walls of the container and to control desorption of water entrapped in the polymer walls of the container.
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