Ozone system for multi-chamber tools
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United States of America Patent
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Jul 9, 2013
Grant Date -
May 12, 2011
app pub date -
Jan 18, 2011
filing date -
Jul 7, 2005
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Abstract
An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.
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