THIN-FILM SOLAR CELL MANUFACTURING APPARATUS
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United States of America Patent
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Issued Date -
Apr 28, 2011
app pub date -
Jun 5, 2009
filing date -
Jun 6, 2008
priority date (Note) -
Abandoned
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Abstract
A thin-film solar cell manufacturing apparatus, includes: a film formation space in which a substrate is disposed so that a film formation face of the substrate is substantially parallel to a direction of gravitational force, and in which a desired film is formed on the film formation face by a CVD method; a cathode unit including cathodes to which a voltage is applied, and two or more power feeding points, the cathodes being disposed at both sides of the cathode unit; and an anode distantly disposed so as to face the cathodes that are disposed at both sides of the cathode unit.
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