Positive-Working Photoimageable Bottom Antireflective Coating
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United States of America Patent
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Issued Date -
Apr 14, 2011
app pub date -
Oct 9, 2009
filing date -
Oct 9, 2009
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a positive bottom photoimageable antireflective coating composition which is capable of being developed in an aqueous alkaline developer, wherein the antireflective coating composition comprises a polymer comprising at least one recurring unit with a chromophore group and one recurring unit with a hydroxyl and/or a carboxyl group, a vinyl ether terminated crosslinking agent of structure (7), and optionally, a photoacid generator and/or an acid and/or a thermal acid generator, where structure (7) islinear or branched alkylene and n≧2. The invention further relates to a process for using such a composition.
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