THERMAL FIELD EMISSION CATHODE
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United States of America Patent
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app pub date -
Dec 17, 2010
filing date -
Jun 24, 2008
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Abandoned
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Abstract
A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.
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