Positive-working photoimageable bottom antireflective coating
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United States of America Patent
Stats
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Jan 21, 2014
Grant Date -
Mar 31, 2011
app pub date -
Sep 30, 2009
filing date -
Sep 30, 2009
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The invention relates to a photoimageable antireflective coating composition capable of forming a pattern by development in an aqueous alkaline solution, comprising, (i) a polymer A soluble in a coating solvent and comprises a chromophore, a crosslinking moiety, and optionally a cleavable group which under acid or thermal conditions produces a functionality which aids in the solubility of the polymer in an aqueous alkaline solution and; (ii) at least one photoacid generator; (iii) a crosslinking agent; (iv) optionally, a thermal acid generator; (v) a polymer B which is soluble in an aqueous alkaline solution prior to development, where polymer B is non-miscible with polymer A and soluble in the coating solvent, and; (vi) a coating solvent composition, and (vii) optionally, a quencher. The invention also relates to a process for imaging the antireflective coating.
First Claim
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International Classification(s)
- 2009 Application Filing Year
- C08F Class
- 1584 Applications Filed
- 973 Patents Issued To-Date
- 61.43 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 8 Citation Count
- C08F Class
- 15.03 % this patent is cited more than
- 11 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 21, 2025 |
