Systems and Methods for Resonance Frequency Tuning of Micromachined Structures
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United States of America Patent
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Issued Date -
Mar 31, 2011
app pub date -
Sep 14, 2010
filing date -
Sep 28, 2009
priority date (Note) -
Abandoned
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Abstract
A microstructure according to embodiments of the present invention comprises a substrate, and a resonant structure having a resonance frequency and comprising a seismic mass and suspension elements for suspending the seismic mass at two opposite sides onto the substrate. The substrate is adapted for functioning as a tuning actuator adapted for applying stress onto the suspension elements, thus changing the stiffness of the suspension elements. This way, the resonance frequency of the microstructure may be adapted to input vibration frequencies which may vary over time or may initially be unknown. By adapting the resonance frequency of the resonant structure, a suitable power may be generated, even in circumstances of variable input frequencies.
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