Radiation Collector
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United States of America Patent
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Issued Date -
Mar 31, 2011
app pub date -
Jun 4, 2009
filing date -
Jun 5, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention relates to a radiation collector (10) designed to concentrate part of the radiation produced by a source on a spot (100). The collector includes a primary concave mirror (1) and a secondary convex mirror (2), each being rotationally symmetrical about an optical axis (X-X) of the collector. The primary mirror is configured to reflect the radiation collected with an angle of incidence (i) that is substantially constant between different points on said main mirror. Such a collector is particularly suitable for use with a discharge produced plasma source.
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