CLEANING METHOD, CLEANING SYSTEM, AND METHOD FOR MANUFACTURING MICROSTRUCTURE
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United States of America Patent
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Issued Date -
Mar 31, 2011
app pub date -
Sep 13, 2010
filing date -
Sep 25, 2009
priority date (Note) -
Abandoned
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Abstract
According to one embodiment, a cleaning method is disclosed. The method can produce an oxidizing solution including an oxidizing substance by electrolyzing a dilute sulfuric acid solution. In addition, the method can supply a highly concentrated inorganic acid solution individually, sequentially, or substantially simultaneously with the oxidizing solution to a surface of an object to be cleaned.
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