REMOVAL OF GALLIUM AND GALLIUM CONTAINING MATERIALS

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United States of America Patent

APP PUB NO 20110073136A1
SERIAL NO

12878556

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Abstract

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is removed using the exhaust system of the chamber by raising the temperature of the desorbing surface. Other volatile gallium-containing by-products may also be formed and removed from the exhaust system.

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Patent Owner(s)

Patent OwnerAddress
MATHESON TRI-GAS INC150 ALLEN ROAD BASKING RIDGE NJ 07920

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mitchell, Glenn Longmont, US 7 104
Seymour, Adam Longmont, US 10 130
Sievers, Michael Longmont, US 12 114
Torres,, JR Robert Parker, US 24 568

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