APPARATUS AND PROCESS FOR CRYSTAL GROWTH
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United States of America Patent
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Oct 14, 2010
filing date -
Feb 22, 2005
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Abstract
The present invention relates to an apparatus for vapour phase crystal growth to produce multiple single crystals in one growth cycle comprising one central source chamber, a plurality of growth chambers, a plurality of passage means adapted for transport of vapour from the source chamber to the growth chambers, wherein the source chamber is thermally decoupled from the growth chambers.
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