Rotary Target Assembly and Rotary Target

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20110062020A1
SERIAL NO

12585421

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Abstract

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A rotary target assembly has a cylindrical target and a cylindrical backing tube. A difference between an inner diameter of the cylindrical target and an outer diameter of the cylindrical backing tube substantially equals a yield strain of a target material multiplied by the inner diameter of the cylindrical target and multiplied by N, wherein N is between 1 and 10. The difference can be adjusted according to the target material, dimension of the cylindrical target, so the cylindrical target can be combined tightly with cylindrical backing tube. A resulting rotary target of the present invention has improved thermal and electrical conductivities.

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Patent Owner(s)

Patent OwnerAddress
SOLAR APPLIED MATERIALS TECHNOLOGY CORPNO 1 GONGYE 3RD RD ANNAN DIST TAINAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsu, Wel-Hsun Tainan, TW 1 0
Wu, Chung-Han Tainan, TW 17 69
Wu, I-Sheng Tainan, TW 2 1

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