Scanning probe microscope and a measuring method using the same
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United States of America Patent
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Jan 8, 2013
Grant Date -
Mar 3, 2011
app pub date -
Jul 1, 2010
filing date -
Aug 28, 2009
priority date (Note) -
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Abstract
It is difficult for a scanning probe microscope according to the conventional technology to operate a probe for scanning and positioning in a wide range and for high-precision scanning in a narrow range. A scanning probe microscope according to the invention uses probe driving actuators for coarse adjustment and fine adjustment. For scanning and positioning in a wide range, the coarse adjustment actuator is switched to fast responsiveness. For scanning in a narrow range, the coarse adjustment actuator is switched to slow responsiveness. Instead, positional noise is reduced and the fine adjustment actuator is mainly used for scanning in a narrow range. The probe is capable of not only scanning and positioning in a wide range but also high-precision scanning in a narrow range.
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