POLISHING APPARATUS
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United States of America Patent
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Issued Date -
Mar 3, 2011
app pub date -
Aug 23, 2010
filing date -
Aug 31, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The polishing apparatus is capable of improving accuracy of polishing a work. The work is pressed onto a polishing cloth, with an elastic sheet, by a pressing force generated by second pressing means and applied to a carrier and inner pressure of a first fluid chamber generated by a fluid supplied thereto, so as to polish the work. The fluid, which has been downwardly supplied into the first fluid chamber, horizontally flows outward in the first fluid chamber, collides with a side wall of a concave part of a board-shaped member and flows upward, and then the fluid is discharged outside from a fluid outlet, thereby a fluid feeding member follows movement of the elastic sheet and maintains parallel to the elastic sheet, and the fluid feeding member is centered in the first fluid chamber.
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