METHOD AND APPARATUS FOR CROSS-SECTION PROCESSING AND OBSERVATION
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United States of America Patent
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Issued Date -
Mar 3, 2011
app pub date -
Sep 1, 2010
filing date -
Sep 3, 2009
priority date (Note) -
Abandoned
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Abstract
A cross-section processing and observation method includes: forming a cross section in a sample by a focused ion beam through etching processing; obtaining a cross-section observation image through cross-section observation by the focused ion beam; and forming a new cross section by performing etching processing in a region including the cross section and obtaining a cross-section observation image of the new cross section. A surface observation image of a region including a mark on the sample and the cross section is obtained. A position of the mark is recognized in the surface observation image and etching processing is performed on the cross section by setting, in reference to the position of the mark, a focused ion beam irradiation region in which to form the new cross section. Cross-section processing and observation is thus enabled continuously and efficiently using a focused ion beam apparatus having no SEM apparatus.
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