METHOD FOR DEVELOPING THIN FILM FROM OXIDE OR SILICATE OF HAFNIUM NITRIDE, COORDINATION COMPOUND USED IN SAID METHOD, AND METHOD FOR PRODUCING INTEGRATED ELECTRONIC CIRCUIT

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Issued Date
Mar 3, 2011
app pub date
Mar 16, 2009
filing date
Mar 17, 2008

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Abandoned

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Abstract

; and x is an integer between 1 and 4 inclusive; then decomposing this gas phase on a heated substrate. The invention is used particularly in the field of microelectronics.

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Patent Owner	Address
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE	PARIS FRA
UNIVERSITE CLAUDE BERNARD LYON I	43 BOULEVARD DU 11 NOVEMBRE 1918 VILLEURBANNE CEDEX 69622
INSTITUT POLYTECHNIQUE DE GRENOBLE	46 AVENUE FÉLIX VIALLET GRENOBLE 38000

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Inventor Name	Address	# of filed Patents	Total Citations
Brize, Virginie	Saint Martin d'Heres, FR	6	8
Daniele, Stéphane	Meyzieu, FR	2	1
Dubourdieu, Catherine	Grenoble, FR	4	4
Eleter, Mohamad	Villeurbanne, FR	1	1

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METHOD FOR DEVELOPING THIN FILM FROM OXIDE OR SILICATE OF HAFNIUM NITRIDE, COORDINATION COMPOUND USED IN SAID METHOD, AND METHOD FOR PRODUCING INTEGRATED ELECTRONIC CIRCUIT

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12922828

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12922828

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