DRIVE CONTROL METHOD, DRIVE CONTROL APPARATUS, STAGE CONTROL METHOD, STAGE CONTROL APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS AND MEASURING APPARATUS
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United States of America Patent
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app pub date -
Mar 8, 2010
filing date -
Sep 7, 2007
priority date (Note) -
Abandoned
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Abstract
A drive control method of controlling an object which can move at least in a first direction and a second direction different from the first direction is provided. Here, a force applied to the object is controlled on the basis of a driving signal for driving a first actuator moving the object in the first direction and a disturbance correcting signal generated from a disturbance signal in the second direction at an output terminal of the object.
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