WAFER PROBE TEST AND INSPECTION SYSTEM
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United States of America Patent
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Issued Date -
Feb 17, 2011
app pub date -
May 15, 2008
filing date -
May 15, 2007
priority date (Note) -
Abandoned
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Abstract
An apparatus for electrically testing a semiconductor device is herein disclosed. The apparatus includes carriers for a semiconductor device and a probe card (52) that are adapted for complementary registration with one another. The coupled carriers may be stacked or used in another high-density arrangement during electrical test or burn-in to improve test cell utilization.
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