PROCESS AND APPARATUS FOR PRODUCING CARBONACEOUS FILM
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United States of America Patent
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Issued Date -
Feb 10, 2011
app pub date -
Dec 7, 2007
filing date -
Dec 7, 2006
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Abandoned
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Abstract
This invention provides a process and apparatus for producing a carbonaceous film such as a DLC film using a solid raw material without the need to supply a high energy radiation such as a laser beam. The process comprises providing a solid organic material as a raw material, applying a discharge energy to the material to form plasma, and depositing the plasma onto a base material to form a carbonaceous film. This process is preferably carried out by using a film production apparatus (1) comprising discharge means (10). The discharge means (10) comprises a pair of electrodes (a raw material holder) (12, 14) for holding a raw material (50) and voltage applying means (20) for applying voltage across the electrodes.
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