Adjacent Field Alignment
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United States of America Patent
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Issued Date -
Feb 10, 2011
app pub date -
Jul 29, 2010
filing date -
Aug 4, 2009
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Abstract
Methods for imprinting on abutted fields of a substrate are described. Generally, a first field of a substrate may be imprinted using an imprint lithography template. The template may then be placed such that a portion of the template overlaps the first field of the substrate while imprinting a second field of the substrate.
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