DEVICE FOR THE PLASMA TREATMENT OF WORKPIECES
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United States of America Patent
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Issued Date -
Feb 3, 2011
app pub date -
Aug 14, 2008
filing date -
Sep 21, 2007
priority date (Note) -
Abandoned
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Abstract
The device serves for the plasma treatment of workpieces. The workpiece is placed in the chamber of a treatment station which can at least partially be evacuated. The plasma chamber is defined by a chamber bottom, a chamber cover, as well as a lateral chamber wall, and has a positionable gas lance. The gas lance is constructed at least partially of a dielectric.
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