GROOVED CMP POLISHING PAD

United States of America Patent

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N/A
Issued Date
Jan 20, 2011
app pub date
Jul 16, 2010
filing date
Jul 16, 2009

priority date (Note)
Abandoned

status (Latency Note)

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Patent Owner(s)

Patent Owner	Address
CABOT MICROELECTRONICS CORPORATION	870 NORTH COMMONS DRIVE AURORA IL 60504

International Classification(s)

B24D:TOOLS FOR GRINDING, BUFFING, OR SHARPENING

[Classification Symbol]

[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Chiu, Hao-Kuang	Taipei City, TW	9	76
Hsu, Jia-Cheng	Tainan City, TW	4	39
Khanna, Dinesh	Naperville, US	4	23
Liu, Sheng-Huan	KweiShen, TW	3	32
Naman, Ananth	Naperville, US	18	378
Sun, Fred	Naperville, US	6	40
TSAI, Ching-Ming	Jhudong Township, TW	8	62

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GROOVED CMP POLISHING PAD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12837705

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12837705

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