Plasma Gun and Plasma Gun Deposition System Including the Same
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United States of America Patent
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Issued Date -
Jan 20, 2011
app pub date -
Aug 29, 2006
filing date -
Mar 1, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A plasma gun of the present invention includes: a container having a plasma outflow opening; a cathode (18) which is disposed inside the container to generate plasma by discharge; an auxiliary anode which is disposed to be able to be located between the plasma outflow opening and the cathode and is able to receive the plasma generated by the cathode; an exhaust valve for exhausting air from and sealing an inside of the container; and a plasma flow-out preventing/allowing device which prevents the plasma, having been generated by the discharge of the cathode, from flowing out from the plasma outflow opening and allows the plasma to flow out from the plasma.
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