PIEZOELECTRIC THIN-FILM TUNING FORK RESONATOR
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United States of America Patent
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Issued Date -
Jan 6, 2011
app pub date -
Jul 2, 2009
filing date -
Jul 2, 2009
priority date (Note) -
Abandoned
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Abstract
The piezoelectric thin-film tuning fork resonator (40) comprises an integral tuning fork made out of a quartz crystal. The tuning fork comprises a base (48) and a pair of parallel vibrating arms (44, 46) extending from the base. Each of the vibrating arms carries: first and second electrodes (62, 64) provided on at least one main surface of the arm, said first and second electrodes being formed respectively on an inner portion and on an outer portion of said one main surface, in such a way as to be spaced apart, first and second piezoelectric thin films (66, 68) formed over the first and second electrodes respectively, third and fourth electrodes (70, 72) formed over the first and second piezoelectric thin films respectively.
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