Integrated handling system for semiconductor articles
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 13, 2022
Grant Date -
Dec 23, 2010
app pub date -
Jun 17, 2010
filing date -
Jun 17, 2009
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Methods and apparatuses for integrated cleaning of objects comprising a sequence of wet cleaning and vacuum drying in a same process chamber. The present integrated cleaning process can eliminate moving parts, improving the system reliability. Vacuum decontamination can be included for degassing and decontaminating the cleaned objects. In an embodiment, a cleaner system combines various movements into an integrated movement to be handled by a robot, for example, to improve the throughput. For example, an integrated robot movement comprising picking up a closed container from the input load port, moving both the lid and body together, and then depositing the body and lid separately into the appropriate positions in the cleaner to be cleaned.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2010 Application Filing Year
- H01L Class
- 16510 Applications Filed
- 13147 Patents Issued To-Date
- 79.64 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 3 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Mar 13, 2026 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 13, 2030 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 13, 2034 |
