SILICA GLASS CRUCIBLE, METHOD OF MANUFACTURING THE SAME AND PULLING METHOD

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United States of America Patent

APP PUB NO 20100319608A1
SERIAL NO

12303139

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Abstract

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A silica glass crucible including an outer surface layer formed of a bubble-containing silica glass layer and an inner surface layer formed of a silica glass layer whose bubbles are invisible to the naked eye, so as to sufficiently disperse heat from the external radiation thereby preventing temperature irregularity in the silicon melt, and at the same time, exhibit excellent heat conductivity thereby giving a uniformly heated state over a wide range in the entire crucible without taking a long time for increasing the temperature to form a silicon melt, wherein an intermediate layer is interposed between the outer surface layer and the inner surface layer while in the intermediate layer, a bubble-containing silica glass layer (bubble-containing layer) including bubbles with a diameter of 100 μm or smaller by 0.1% or more in the volumetric bubble content and a silica glass layer (transparent glass layer) including the bubbles by 0.05% or less in the volumetric bubble content are laminated.

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Patent Owner(s)

Patent OwnerAddress
JAPAN SUPER QUARTZ CORPORATIONAKITA-SHI AKITA-KEN 010-0065

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanda, Minoru Akita-ken, JP 42 552

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