Spin On Organic Antireflective Coating Composition Comprising Polymer with Fused Aromatic Rings
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United States of America Patent
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Issued Date -
Dec 16, 2010
app pub date -
Jun 10, 2009
filing date -
Jun 10, 2009
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Abstract
The present invention relates to an organic spin on hard mask antireflective coating composition comprising a polymer comprising at least one unit of fused aromatic rings in the backbone of the polymer and at least one unit with a cycloaliphatic moiety in the backbone of the polymer. The invention further relates to a process for making the polymer and a process for imaging the present composition.
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