Method And Device For Measuring A Height Difference
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United States of America Patent
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Issued Date -
Dec 16, 2010
app pub date -
Nov 19, 2007
filing date -
Dec 7, 2006
priority date (Note) -
Abandoned
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Abstract
Determination of the height difference between a first reference point and a second reference point, at least one of the two reference points lying on a semiconductor chip, which is mounted on a substrate, comprises the stepsE) calculating the height difference from the first difference and the second difference.
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