FLUID CONTROL METHOD, FLUID CONTROL SYSTEM, AND NON-TRANSITORY COMPUTER-READABLE MEDIUM STORING FLUID CONTROL PROGRAM
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United States of America Patent
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Issued Date -
Dec 9, 2010
app pub date -
May 26, 2010
filing date -
Jun 4, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A fluid control method for maintaining a split flow ratio of main gas to be split from a main line into first and second sublines constant before and after additive gas is supplied to one of the sublines is achieved by controlling a flow rate of the main gas to be supplied from the main line to a chamber through the first and second sublines based on the pressure in each of the first and second sublines when the additive gas is to be supplied to the second subline. The pressure in the first subline not supplied with the additive gas is controlled to remain constant during supply of the additive gas to the second subline.
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