Dielectric Oxide Films and Method for Making Same

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United States of America Patent

SERIAL NO

12730151

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Abstract

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Dielectric oxide materials prepared by producing a sol from a mixture of a metal oxide precursor, a solvent, and an epoxide, and preparing a metal oxide material from the sol. In various versions, the mixture can also include a cosolvent, one or more additional metal oxide precursors, water, or a precursor to a glassforming oxide, or any combination thereof. The prepared dielectric oxide materials can be in the form of thin films having high κ values, low electrical leakage, and low dielectric loss tangent values.

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Patent Owner(s)

Patent OwnerAddress
SBA MATERIALS INC2186 BERING DRIVE SAN JOSE CA 95131

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ferguson, Saul Albuquerque, US 11 278
Phillps, Mark Albuquerque, US 1 2
Thoms, Travis Bosque Farms, US 1 2

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